ILS-150S ガラス基板カセット位置決め装置IGUCHI

ILS-150S Glass substrate cassette positioning unit IGUCHI made in Japan. ILS Series positioning stages upper plate rolls smoothly in any 360 degree direction. Despite their compactness, they also can carry heavy loads than conventional type and set the substrate cassette at a desired position

• ILS-150S
• Moving Distance: √Ǭ±15mm
• Recommended Air Pressure: 0.2MPa (2 kgf/cm^2)
• Case : Aluminum+Alumite
• Fixing Flange : Aluminum+Alumite
• Moving Stage : SUS304
• Load Capacity : 150kgf
• Quantety : ONE